The aim of the project is to improve the equipment of the Centre of Materials and Nanotechnogy, whose research is focused on nano and microstructures of chalcogenide and oxidised materials. Devices already installed (e.g. ALD) need complementary material-analytical techniques (XPS, XRD, SEM). In accordance with the CEMNAT development plan, equipment for material synthesis is required. The project will support the efficient use of the research infrastructure CEMNAT, which is part of the road map of the Czech Republic by 2020 and.