1.1.1. Short description of the project summaryNano capacitors (NCs) are widely used in micro and nanodevices. The NC production market is developing rapidly and will maintain its growth rate for at least 10 years. Latvian producers have the possibility to produce NC, but this is not yet done. The aim of the project shall be: Develop an innovative NC dielectric layer manufacturing technology that reduces the production costs of NC in order to increase the knowledge-intensiveness, competitiveness and sustainable development of the Latvian economy. The project applicant is Riga Technical University, cooperation partners University of Latvia and semiconductor devices factory AS “ALFA PRAR”. An industrial study will be carried out with actions: 1. production of NC and ON...NO samples with layers synthesised in the same reactor N...N; 2. characterisation of N...N, ON...NO and NC properties, including after exposure and heating; 3) NC with N...N layers of manufacturing technology prototyping in a laboratory environment. The project is in line with the fields of physical sciences (1.3), material sciences (2.5) and nanotechnology (10.2). Results: 1) dissemination of results in the form of scientific publications, conferences, seminars; 2) Prototyping NC production technology developed in a laboratory environment; 3) a patent application on the method of obtaining a N...N layer. Target groups: Scientific institutions, scientists, doctoral students, merchants. Project duration from 02.01.2017 to 30.12.2019 The total eligible costs of the project are EUR 648605,05, including EUR 551314.29 ERDF funding and EUR 48645,38 state budget funding. Keywords: Nanocondenser, silicon, silicon nitride nanolayer, radiation defects.1.1.2. A full description of the project The production market of theNC is rapidly developing and will maintain its pace of development for at least 10 years [1]. There is an increasing demand for thermally stable [1] and radiation resistant NC. Silicon-based technologies are widely used for the production of NC. The entry of Latvian producers into the production market of NC can increase the turnover of the Latvian economy by at least 0.23 to 10 MEUR every 3-4 weeks. The dielectric layer of NC is most often obtained by assembling several Si3N4 (N) nanolayers together and surrounds them on both sides with SiO2 (O), resulting in the ON...NO structure. N...N layers are obtained from several technological reactors. The cost of production of NC can be reduced by acquiring layers of N...N in one reactor. The aim of the project shall be: Develop an innovative NC dielectric layer manufacturing technology that reduces the production costs of NC in order to increase the knowledge-intensiveness, competitiveness and sustainable development of the Latvian economy. Uneconomic cooperation project will be implemented: Project submitter is RTU, cooperation partners LU and AS “ALFA PRAR”. An industrial study will be carried out with actions: 1. production of NC and ON...NO samples with layers synthesised in the same reactor N...N; 2. characterisation of N...N, ON...NO and NC properties, including after exposure and heating; 3) NC with N...N layers of manufacturing technology prototyping in a laboratory environment. The project is in line with the fields of physical sciences (1.3), material sciences (2.5) and nanotechnology (10.2). Results: 1) dissemination of results in the form of scientific publications, conferences, seminars; 2) Prototyping NC production technology developed in a laboratory environment; 3) a patent application on the method of obtaining a N...N layer. The project is in line with the fields of physical sciences (1.3), material sciences (2.5) and nanotechnology (10.2). The target group of the project is scientific institutions, scientists, doctoral students, merchants. The project will promote international competitiveness of scientific institutions, their employees and merchants, attracting students will promote renewal and succession of scientific personnel in Latvia. The total eligible costs of the project are EUR 648605,05, including EUR 551314.29 ERDF funding and EUR 48645,38 state budget funding. Duration of the project: From 01.03.2017 to 29.02.2020