The CryoMEM project addresses the issue of energy storage, which is the subject of the DPS3. Connected objects and embedded/autonomous systems more generally perform an increasing number of functions, while being more miniaturised. This requires an increase in the level of integration, which must also be followed by their energy sources. The latter are mainly micro-batteries or microsupercapacitors, which are manufactured with a series of steps, some of which come from microtechnologies. In recent years, GREMI has been involved in projects aimed at developing such schemes: —Project APR Blades: realisation of microbatteries (2011-2014) -Project Lavoisier STOCKE-DEPOYDE: realisation of microbatteries (2016-2017) -SuSSCRYPP project: realisation of 3D capacitances from homopolymer and cryogravure films (2014-2017) The last two, still in progress at the time of the filing of the CryoMEM project’s opportunity notice, ended at the end of 2017 but an APR project, "SCAP3D has just started, for a period of 2 years. It aims to design 3D microsupercapacitors, which fits perfectly with the objectives of the DPS3. For this type of application, GREMI brings its expertise in cryogenic plasma engraving. The deep engraving processes studied and developed at GREMI allow the realisation of 3D silicon substrates that are the basis of these microsources...