CEA Tech, together with its Leti Institute, develops applications of micronano technologies in the fields of biology, health, environment and safety, but also in related fields in agri-food and bio-production. Thus, for 15 years in the Chemistry, Sensors and Biomaterials laboratory of the Leti Health Department, the CEA has developed a unique know-how in surface functionalisation, based on the automated deposition of fine organic layers serving as functional interfaces between the material and its environment. A catalogue of about a hundred deposit processes with different physico-chemical properties was created and as many patents filed. The objective is to integrate surface functionalisation activity into the manufacturing process of micro and nano systems taking into account manufacturing constraints. For this, it is necessary to be able to adapt the deposits to the nature of the components. Thus, full deposition plate equipment without solvent is essential because it allows a deposit compatible with the principles of green chemistry, at low temperature (35 °C), compliant and without altering the materials of the devices. In order to maintain the leadership on surface functionalisation and continue to carry out these industrial and institutional programs, the CEA wants to replace obsolete and aging steam deposition equipment with a new generation.