MEMS chips are mainly used in sensors MEMS stands for ‘Microelectromechanical systems’. They combine electrical and non-electrical properties such as thermal, fluidic or optical properties. MEMS chips are made in a similar way to regular chips by putting structures on wafers. It is not yet possible to test MEMS chips on the wafer. This is because these chips also need to be tested for non-electrical properties. The Meteorite II project builds on the results of METEORIET I, which developed an innovative early wafer test technology for MEMS chips. The aim is to validate this technology and thus further strengthen the test valley in the Eastern Netherlands. This will attract more companies that want to demonstrate their advanced chips in Twente. By means of economies of scale, this should lead to lower testing costs and higher volumes. But also better quality MEMS chips